Patent Assignment
Reel/Frame 053631/0093
Assignment of Assignor's Interest
Recorded: 2020-08-28
Pages: 10
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2019-09-25
Assignees
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD.
NO. 8 BUILDING, NO. 28 JINGHAI ER RD., ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEIJING, 100176, CHINA
Covered Property
(1)
Methods For Processing a Workpiece Using Fluorine Radicals
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 28, 2020
From: ZHANG, QI; LU, XINLIANG
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 053630/0902 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →