IP Library › Assignment 055157/0435
Patent Assignment
Reel/Frame 055157/0435

Assignment of Assignor's Interest

Recorded: 2021-02-05 Pages: 5
Assignors
WANSIDLER, ALEX
Executed: 2021-01-22
HEZLER, DIETER
Executed: 2021-01-22
Assignee
MATTSON THERMAL PRODUCTS GMBH
DAIMLERSTRASSE 10, DORNSTADT, 89160, GERMANY
Covered Property (1)
Plasma Processing Apparatus Having a Focus Ring Adjustment Assembly
Application: 15/930,874 →
Publication: US 2020/0365377
Related Assignments (3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Feb 5, 2021
From: ZUCKER, MARTIN L.; PAKULSKI, RYAN M.; MA, SHAWMING; YANG, MICHAEL X.
To: MATTSON TECHNOLOGIES, INC.
Reel/Frame 055157/0440 →
Assignment of Assignor's Interest Feb 23, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055368/0987 →
Assignment of Assignor's Interest Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →