Patent Assignment
Reel/Frame 055157/0440
Assignment of Assignor's Interest
Recorded: 2021-02-05
Pages: 20
Assignors
ZUCKER, MARTIN L.
Executed: 2021-01-22
PAKULSKI, RYAN M.
Executed: 1999-11-08
MA, SHAWMING
Executed: 2021-01-22
YANG, MICHAEL X.
Executed: 2021-01-22
TEVIS, TED
Executed: 2021-01-26
LEMBESIS, PETER J.
Executed: 2019-06-11
Assignee
MATTSON TECHNOLOGIES, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Processing Apparatus Having a Focus Ring Adjustment Assembly
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 5, 2021
From: WANSIDLER, ALEX; HEZLER, DIETER
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 055157/0435 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055368/0987 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →