IP Library › Assignment 055547/0588
Patent Assignment
Reel/Frame 055547/0588

Assignment of Assignor's Interest

Recorded: 2021-03-10 Pages: 5
Assignors
BECKER, MORITZ
Executed: 2020-01-27
EHM, DIRK HEINRICH
Executed: 2020-01-14
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property (1)
Method for Removing a Contamination Layer by an Atomic Layer Etching Process
Application: 16/734,650 →
Publication: US 2020/0142327
Related Assignments (3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Mar 1, 2021
From: ROOZEBOOM, FRED; ILLIBERI, ANDREA; TE SLIGTE, EDWIN; CREIJGHTON, YVES LODEWIJK MARIA
To: TNO SCIENCE & INDUSTRY
Reel/Frame 055442/0841 →
Corrective Assignment to Correct the Receiving Party Name and Address Previously Recorded at Reel: 55442 Frame: 841. Assignor(S) Hereby Confirms the Assignment. Sep 10, 2021
From: ROOZEBOOM, FRED; ILLIBERI, ANDREA; TE SLIGTE, EDWIN; CREIJGHTON, YVES LODEWIJK MARIA
To: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Reel/Frame 057565/0791 →
Assignment of Assignor's Interest Sep 28, 2021
From: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
To: CARL ZEISS SMT GMBH
Reel/Frame 057622/0429 →