Patent Assignment
Reel/Frame 057622/0429
Assignment of Assignor's Interest
Recorded: 2021-09-28
Pages: 3
Assignor
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Executed: 2020-12-18
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Removing a Contamination Layer by an Atomic Layer Etching Process
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 1, 2021
From: ROOZEBOOM, FRED; ILLIBERI, ANDREA; TE SLIGTE, EDWIN; CREIJGHTON, YVES LODEWIJK MARIA
To: TNO SCIENCE & INDUSTRY
Reel/Frame 055442/0841 →
Assignment of Assignor's Interest
Mar 10, 2021
From: BECKER, MORITZ; EHM, DIRK HEINRICH
To: CARL ZEISS SMT GMBH
Reel/Frame 055547/0588 →
Corrective Assignment to Correct the Receiving Party Name and Address Previously Recorded at Reel: 55442 Frame: 841. Assignor(S) Hereby Confirms the Assignment.
Sep 10, 2021
From: ROOZEBOOM, FRED; ILLIBERI, ANDREA; TE SLIGTE, EDWIN; CREIJGHTON, YVES LODEWIJK MARIA
To: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Reel/Frame 057565/0791 →