Patent Assignment
Reel/Frame 056132/0490
Assignment of Assignor's Interest
Recorded: 2021-05-04
Pages: 3
Assignor
YANG, MICHAEL X.
Executed: 2020-01-10
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Control System For Adaptive Control Of A Thermal Processing System
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055368/0987 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →
Assignment of Assignor's Interest
May 4, 2021
From: LIEBERER, MARKUS; CIBERE, JOSEPH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 056132/0516 →