Patent Assignment
Reel/Frame 056547/0147
Assignment of Assignor's Interest
Recorded: 2021-06-15
Pages: 3
Assignor
SUZUKI, ATSUSHI
Executed: 2021-06-01
Assignee
SHOWA DENKO K.K.
13-9, SHIBA DAIMON 1-CHOME, MINATO-KU, TOKYO, 1058518, JAPAN
Covered Property
(1)
Etching Method Using Halogen Fluoride and Method for Producing Semiconductor
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.