Patent Assignment
Reel/Frame 058114/0511
Assignment of Assignor's Interest
Recorded: 2021-11-15
Pages: 4
Assignor
MATSUI, KAZUMA
Executed: 2021-10-14
Assignee
SHOWA DENKO K.K.
13-9, SHIBADAIMON 1-CHOME, MINATO-KU, TOKYO, 105-8518, JAPAN
Covered Property
(1)
Etching Method for Silicon Nitride and Production Method for Semiconductor Element
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.