Patent Assignment
Reel/Frame 059194/0477
Assignment of Assignor's Interest
Recorded: 2022-03-08
Pages: 4
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Inspection System and Inspection Method to Qualify Semiconductor Structures
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.