Patent Assignment
Reel/Frame 059289/0782
Assignment of Assignor's Interest
Recorded: 2022-03-17
Pages: 4
Assignors
WU, CHENG-LUNG
Executed: 2022-03-15
CHU, YANG-ANN
Executed: 2022-03-15
PAI, JIUN-RONG
Executed: 2022-03-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
8, LI-HSIN RD. 6,, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Wafer Alignment Apparatus and Method for Multi-Cassette Load Port
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.