Patent Assignment
Reel/Frame 060189/0613
Assignment of Assignor's Interest
Recorded: 2022-06-14
Pages: 3
Assignor
HUANG, CHIH-HUNG
Executed: 2022-06-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Wafer Alignment Apparatus and Method for Multi-Cassette Load Port
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.