IP Library › Assignment 062869/0530
Patent Assignment
Reel/Frame 062869/0530

Assignment of Assignor's Interest

Recorded: 2023-03-03 Pages: 5
Assignors
YANG, MICHAEL X.
Executed: 2021-01-07
YANG, YUN
Executed: 2021-01-19
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property (1)
Workpiece Processing Apparatus with Gas Showerhead Assembly
Application: 17/549,102 →
Publication: US 2022/0195601
Related Assignments (3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Mar 3, 2023
From: SOHN, MANUEL; HAMM, SILKE; WANSIDLER, ALEX; HEZLER, DIETER
To: MATTSON THERMAL PRODUCTS, GMBH.
Reel/Frame 062869/0541 →
Assignment of Assignor's Interest Mar 3, 2023
From: MATTSON THERMAL PRODUCTS, GMBH.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 062869/0553 →
Assignment of Assignor's Interest Mar 3, 2023
From: MATTSON TECHNOLOGY, INC.
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD; MATTSON TECHNOLOGY, INC.
Reel/Frame 062869/0557 →