Patent Assignment
Reel/Frame 062869/0557
Assignment of Assignor's Interest
Recorded: 2023-03-03
Pages: 6
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2021-02-19
Assignees
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEIJING, 100176, CHINA
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Workpiece Processing Apparatus with Gas Showerhead Assembly
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 3, 2023
From: YANG, MICHAEL X.; YANG, YUN
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 062869/0530 →
Assignment of Assignor's Interest
Mar 3, 2023
From: SOHN, MANUEL; HAMM, SILKE; WANSIDLER, ALEX; HEZLER, DIETER
To: MATTSON THERMAL PRODUCTS, GMBH.
Reel/Frame 062869/0541 →
Assignment of Assignor's Interest
Mar 3, 2023
From: MATTSON THERMAL PRODUCTS, GMBH.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 062869/0553 →