Patent Assignment
Reel/Frame 062869/0541
Assignment of Assignor's Interest
Recorded: 2023-03-03
Pages: 12
Assignors
SOHN, MANUEL
Executed: 2021-01-26
HAMM, SILKE
Executed: 2021-01-07
WANSIDLER, ALEX
Executed: 2021-01-20
HEZLER, DIETER
Executed: 2021-01-07
BREMENSDORFER, ROLF
Executed: 2021-01-12
Assignee
MATTSON THERMAL PRODUCTS, GMBH.
DAIMLERSTRASSE 10, DORNSTADT, 89160, GERMANY
Covered Property
(1)
Workpiece Processing Apparatus with Gas Showerhead Assembly
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 3, 2023
From: YANG, MICHAEL X.; YANG, YUN
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 062869/0530 →
Assignment of Assignor's Interest
Mar 3, 2023
From: MATTSON THERMAL PRODUCTS, GMBH.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 062869/0553 →
Assignment of Assignor's Interest
Mar 3, 2023
From: MATTSON TECHNOLOGY, INC.
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD; MATTSON TECHNOLOGY, INC.
Reel/Frame 062869/0557 →