Patent Assignment
Reel/Frame 066911/0222
Assignment of Assignor's Interest
Recorded: 2024-03-27
Pages: 4
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Device and Method for Operating a Bending Beam in a Closed Control Loop
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.