Patent Assignment
Reel/Frame 067213/0816
Assignment of Assignor's Interest
Recorded: 2024-04-24
Pages: 3
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Device and Method for Operating a Bending Beam in a Closed Control Loop
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.