Metal chemical polishing process for minimizing dishing during semiconductor wafer fabrication

1. A chemical mechanical polishing process for minimizing dishing of metal lines formed in trenches in an insulation layer of each of a plurality of semiconductor wafers during fabrication thereof, comprising for each wafer:

a first, bulk polishing, step of chemically mechanically polishing a metal layer disposed on the insulation layer of the corresponding wafer and having a lower portion located in the trenches of the insulation layer for forming individual metal lines and an upper portion overlying the lower portion;

the first step polishing being effected with a first polishing pad sufficiently to remove the bulk of the upper portion of the metal layer while generating concomitant chemical mechanical polishing residue, and to leave a minimized remainder of the metal layer upper portion substantially without dishing of the metal layer lower portion in the trenches; and

a second, overpolishing, step of continuing the polishing with a second polishing pad sufficiently to remove the remainder of the metal layer upper portion with attendant minimized dishing of the metal layer lower portion to an extent for providing the metal lines as individual metal lines correspondingly disposed in the trenches;

each of the wafers being subjected to the first step polishing with the first polishing pad and thereafter to the second step polishing with the second polishing pad; and

wherein each of a further plurality of said wafers is subjected to said first and second steps, using said second polishing pad for said first polishing step and a third polishing pad for said second step.

2. The process of claim 1 wherein the second polishing pad has at most a substantially deficient content of prior accumulated chemical mechanical polishing residue prior to being used for said first polishing step.

3. The process of claim 1 wherein the third polishing pad has at most a substantially deficient content of prior accumulated chemical mechanical polishing residue.

4. The process of claim 1 wherein each wafer comprises silicon, the insulation layer comprises silicon dioxide and the metal layer is selected from the group consisting of aluminum, copper and tungsten.

5. The process of claim 1 wherein the insulation layer has a thickness of at least about 300 nm and the metal layer has a thickness of about 200–2000 nm.

6. The process of claim 1 wherein the first step is effected at a downforce of about 2–8 psi for about 30–300 seconds and the second step is effected at a downforce of about 2–8 psi for about 5–50 seconds.

7. The process of claim 1 wherein the a stop layer forming an adhesion promoting diffusion barrier is disposed between the insulation layer and the metal layer.

8. The process of claim 7 wherein each wafer comprises silicon, the insulation layer comprises silicon dioxide, the metal layer is selected from the group consisting of aluminum, copper and tungsten, and the stop layer comprises titanium/titanium nitride.

9. The process of claim 7 wherein the insulation layer has a thickness of at least about 300 nm, the metal layer has a thickness of about 200–2000 nm, and the stop layer has a thickness of about 5–200 nm.

10. The process of claim 7 wherein the first step is effected at a downforce of about 2–8 psi for about 30–300 seconds and the second step is effected at a downforce of about 2–8 psi for about 5–50 seconds.

11. A chemical mechanical polishing process for minimizing dishing of metal lines formed in trenches in an insulation layer of each of a plurality of semiconductor wafers during fabrication thereof, comprising for each wafer:

a first, bulk polishing, step of chemically mechanically polishing a metal layer disposed on the insulation layer of the corresponding wafer and having a lower portion located in the trenches of the insulation layer for forming individual metal lines and an upper portion overlying the lower portion, a stop layer forming an adhesion promoting diffusion barrier being disposed between the insulation layer and the metal layer and extending into the trenches;

the first step polishing being effected with a first polishing pad sufficiently to remove the bulk of the upper portion of the metal layer while generating concomitant chemical mechanical polishing residue, and to leave a minimized remainder of the metal layer upper portion, and to expose the portion of the stop layer outwardly of the trenches, substantially without dishing of the metal layer lower portion in the trenches; and

a second, overpolishing, step of continuing the polishing with a second polishing pad sufficiently to remove the remainder of the metal layer upper portion with attendant minimized dishing of the metal layer lower portion to an extent for providing the metal lines as individual metal lines correspondingly disposed in the trenches;

each of the wafers being subjected to the first step polishing with the first polishing pad and thereafter to the second step polishing with the second polishing pad; and

wherein each of a further plurality of said wafers is subjected to said first and second steps, using said second polishing pad for said first polishing step and a third polishing pad for said second step.

12. The process of claim 11 wherein the second polishing pad has at most a substantially deficient content of prior accumulated chemical mechanical polishing residue prior to being used for said first polishing step, and wherein the third polishing pad has at most a substantially deficient content of prior accumulated chemical mechanical polishing residue.

13. The process of claim 11 wherein each wafer comprises silicon, the insulation layer comprises silicon dioxide, the metal layer is selected from the group consisting of aluminum, copper and tungsten, and the stop layer comprises titanium/titanium nitride.

14. The process of claim 11 wherein the insulation layer has a thickness of at least about 300 nm, the metal layer has a thickness of about 200–2000 nm, and the stop layer has a thickness of about 5–200 nm.

15. The process of claim 11 wherein the first step is effected at a downforce of about 2–8 psi for about 30–300 seconds and the second step is effected at a downforce of about 2–8 psi for about 5–50 seconds.

16. A chemical mechanical polishing process for minimizing dishing of metal lines formed in trenches in an insulation layer of each of a plurality of semiconductor wafers during fabrication thereof, comprising for each wafer:

a first, bulk polishing, step of chemically mechanically polishing a metal layer disposed on the insulation layer of the corresponding wafer and having a lower portion located in the trenches of the insulation layer for forming individual metal lines and an upper portion overlying the lower portion, a stop layer forming an adhesion promoting diffusion barrier being disposed between the insulation layer and the metal layer and extending into the trenches;

the first step polishing being effected with a first polishing pad sufficiently to remove the bulk of the upper portion of the metal layer while generating concomitant chemical mechanical polishing residue, and to leave a minimized remainder of the metal layer upper portion, and to expose the portion of the stop layer outwardly of the trenches, substantially without dishing of the metal layer lower portion in the trenches; and

a second, overpolishing, step of continuing the polishing with a second polishing pad sufficiently to remove the remainder of the metal layer upper portion with attendant minimized dishing of the metal layer lower portion to an extent for providing the metal lines as individual metal lines correspondingly disposed in the trenches;

each of the wafers being subjected to the first step polishing with the first polishing pad and thereafter to the second step polishing with the second polishing pad; and

wherein each of a further plurality of said wafers is subjected to said first and second steps, using said second polishing pad for said first polishing step and a third polishing pad for said second step;

each wafer thereafter being subjected to a third polishing step of chemically mechanically polishing the stop layer to remove the portion thereof outwardly of the trenches.

17. The process of claim 16 wherein the second polishing pad has at most a substantially deficient content of prior accumulated chemical mechanical polishing residue prior to being used for said first polishing step, and wherein the third polishing pad has at most a substantially deficient content of prior accumulated chemical mechanical polishing residue.

18. The process of claim 16 wherein each of a still further plurality of said wafers is subjected to said first and second steps, using said third polishing pad for said first polishing step and a fourth polishing pad for said second step.

19. The process of claim 18 wherein the fourth polishing pad has at most a substantially deficient content of prior accumulated chemical mechanical polishing residue.