Granted Patent
Utility
US 6,566,041
· Confirmation No. 8170
PHOTOMASK AND PATTERN FORMING METHOD USED IN A THERMAL FLOW PROCESS AND SEMICONDUCTOR INTEGRATED CIRCUIT FABRICATED USING THE THERMAL FLOW PROCESS
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-01-10 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-01-10 | SPEC |
Specification | 24 | View | |
| 2001-01-10 | CLM |
Claims | 6 | View | |
| 2001-01-10 | ABST |
Abstract | 1 | View | |
| 2001-01-10 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2001-01-10 | OATH |
Oath or Declaration filed | 3 | View | |
| 2001-01-10 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-01-10 | SPEC |
Specification | 24 | View | |
| 2001-01-10 | CLM |
Claims | 6 | View | |
| 2001-01-10 | ABST |
Abstract | 1 | View | |
| 2001-01-10 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2001-01-10 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
430/322
G03F7/40
H10P50/73
G03F1/00
Prosecution
- Examiner
- DUDA, KATHLEEN
- Art Unit
- 1756
- Docket No.
- NEC 00P303
- Confirmation No.
- 8170
Foreign Priority
2000-002582
·
2000-01-11
·
JAPAN
Publication
- Pub. No.
- US20010007732A1
- Pub. Date
- 2001-07-12
Patent Term Adjustment
-63days
CHANGE OF ADDRESS
Recorded 2017-11-29
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-19
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-01-10
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Quick Facts
- Patent No.
- US 6,566,041
- App. No.
- 09/757,841
- Filed
- 2001-01-10
- Granted
- 2003-05-20
- Pub. No.
- US20010007732A1
- Examiner
- DUDA, KATHLEEN
- Art Unit
- 1756
- PTA
- -63 days
External Links