IP Library Granted Patent US 6,635,567
Granted Patent Utility
US 6,635,567 · Confirmation No. 9997

METHOD OF PRODUCING ALIGNMENT MARKS

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Code Description Pages PDF
2003-08-25 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-01-11 TRNA Transmittal of New Application 1 View
2001-01-11 SPEC Specification 24 View
2001-01-11 CLM Claims 4 View
2001-01-11 ABST Abstract 1 View
2001-01-11 DRW Drawings-only black and white line drawings 2 View
2001-01-11 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,635,567
App. No.
09/758,997
Filed
2001-01-11
Granted
2003-10-21
Pub. No.
US20010019880A1
Art Unit
2822
PTA
-9 days