Patent Application
Utility
App. No. 09/769,634
· Confirmation No. 5305
Method for providing uniform gas delivery to substrates in CVD and PECVD processes
Inventor:
Scott William Dunham
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Inventors
Scott William Dunham
Fremont, CA
Attorneys & Agents of Record
Classification
USPC
438/758
C23C16/45565
C23C16/45574
C23C16/45561
C23C16/45572
H01J37/3244
Prosecution
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- Customer No.
- 8791
- Docket No.
- 4551-0023-D
- Confirmation No.
- 5305
Publication
- Pub. No.
- US20010002582A1
- Pub. Date
- 2001-06-07
Patent Term Adjustment
0days
Parent
is a Division of
→
App. 09/350,417
· US 6,206,972
Filed 1999-07-08
· Patented Case
Child
is a Continuation of
→
App. 09/939,272
Filed 2001-08-23
· Abandoned -- Failure to Respond to an Office Action
Child
is a Continuation of
→
App. 10/335,404
· US 6,616,766
Filed 2002-12-30
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Quick Facts
- App. No.
- 09/769,634
- Filed
- 2001-01-24
- Granted
- 2001-09-04
- Pub. No.
- US20010002582A1
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- PTA
- 0 days
External Links