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App. No. 10/335,404 · Confirmation No. 8038

METHOD AND APPARATUS FOR PROVIDING UNIFORM GAS DELIVERY TO SUBSTRATES IN CVD AND PECVD PROCESSES

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2010-01-08 LET. Miscellaneous Incoming Letter 1 View
2010-01-08 C.AD Change of Address 1 View
2010-01-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2003-07-01 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-07-01 LET. Miscellaneous Incoming Letter 1 View
2002-12-30 TRNA Transmittal of New Application 3 View
2002-12-30 A.PE Preliminary Amendment 6 View
2002-12-30 SPEC Specification 15 View
2002-12-30 CLM Claims 5 View
2002-12-30 ABST Abstract 1 View
2002-12-30 DRW Drawings-only black and white line drawings 5 View
2002-12-30 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/335,404
Filed
2002-12-30
Granted
2003-09-09
Pub. No.
US20030101934A1
Art Unit
2812
PTA
0 days