Patent Application
Utility
App. No. 09/939,272
· Confirmation No. 3811
Method and apparatus for providing uniform gas delivery to substrates in CVD and PECVD processes
Inventor:
Scott William Dunham
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-08-23 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-08-23 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-08-23 | SPEC |
Specification | 16 | View | |
| 2001-08-23 | CLM |
Claims | 5 | View | |
| 2001-08-23 | ABST |
Abstract | 1 | View | |
| 2001-08-23 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2001-08-23 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Scott William Dunham
Fremont, CA
Attorneys & Agents of Record
Classification
USPC
438/758
Prosecution
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- Customer No.
- 24739
- Docket No.
- P382C1
- Confirmation No.
- 3811
Publication
- Pub. No.
- US20010054391A1
- Pub. Date
- 2001-12-27
Parent
is a Continuation of
→
App. 09/769,634
· US 6,284,673
Filed 2001-01-24
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
is a Division of
→
App. 09/350,417
· US 6,206,972
Filed 1999-07-08
· Patented Case
Child
is a Continuation of
→
App. 10/335,404
· US 6,616,766
Filed 2002-12-30
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Quick Facts
- App. No.
- 09/939,272
- Filed
- 2001-08-23
- Pub. No.
- US20010054391A1
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
External Links