IP Library › Granted Patent US 6,673,524
Granted Patent Utility
US 6,673,524 · Confirmation No. 6537

ATTENUATING EXTREME ULTRAVIOLET (EUV) PHASE-SHIFTING MASK FABRICATION METHOD

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2003-08-25 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-08-25 LET. Miscellaneous Incoming Letter 1 View
2003-08-25 DRW Drawings-only black and white line drawings 3 View
2001-02-09 TRNA Transmittal of New Application 4 View
2001-02-09 SPEC Specification 17 View
2001-02-09 CLM Claims 3 View
2001-02-09 ABST Abstract 1 View
2001-02-09 DRW Drawings-only black and white line drawings 4 View
2001-02-09 OATH Oath or Declaration filed 6 View
2001-02-09 LET. Miscellaneous Incoming Letter 1 View
2001-02-09 TRNA Transmittal of New Application 4 View
2001-02-09 SPEC Specification 17 View
2001-02-09 CLM Claims 3 View
2001-02-09 ABST Abstract 1 View
2001-02-09 DRW Drawings-only black and white line drawings 4 View
2001-02-09 OATH Oath or Declaration filed 6 View
2001-02-09 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,673,524
App. No.
09/780,275
Filed
2001-02-09
Granted
2004-01-06
Pub. No.
US20020146648A1
Art Unit
1756
PTA
0 days