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US 6,759,323 · Confirmation No. 2173

METHOD FOR FILLING DEPRESSIONS IN A SURFACE OF A SEMICONDUCTOR STRUCTURE, AND A SEMICONDUCTOR STRUCTURE FILLED IN THIS WAY

Inventor: Markus Kirchhoff
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Quick Facts
Patent No.
US 6,759,323
App. No.
09/793,345
Filed
2001-02-26
Granted
2004-07-06
Pub. No.
US20010054749A1
Examiner
VU, HUNG K
Art Unit
2811
PTA
-45 days