IP Library › Granted Patent US 6,784,508
Granted Patent Utility
US 6,784,508 · Confirmation No. 7077

SEMICONDUCTOR DEVICE HAVING A GATE INSULATING FILM STRUCTURE INCLUDING AN INSULATING FILM CONTAINING METAL, SILICON AND OXYGEN AND MANUFACTURING METHOD THEREOF

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Quick Facts
Patent No.
US 6,784,508
App. No.
09/803,265
Filed
2001-03-09
Granted
2004-08-31
Pub. No.
US20010023120A1
Art Unit
2813
PTA
-67 days