IP Library › Granted Patent US 6,822,248
Granted Patent Utility
US 6,822,248 · Confirmation No. 4985

SPATIAL PHASE LOCKING WITH SHAPED ELECTRON BEAM LITHOGRAPHY

Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2004-10-13 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-08-11 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-11 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-11 1449 List of References cited by applicant and considered by examiner 1 View
2004-08-11 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-08-11 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-11 BIB Bibliographic Data Sheet 1 View
2004-07-26 SRNT Examiner's search strategy and results 1 View
2004-04-23 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-04-20 RCEX Request for Continued Examination (RCE) 1 View
2004-04-20 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-03-12 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-02-24 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2004-02-24 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-24 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-24 FWCLM Index of Claims 1 View
2004-02-24 SRNT Examiner's search strategy and results 4 View
2004-01-21 A.NE Response After Final Action 2 View
2004-01-21 CLM Claims 4 View
2004-01-21 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2003-10-21 CTFR Final Rejection 8 View
2003-07-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-07-23 CLM Claims 4 View
2003-07-23 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-07-23 LET. Miscellaneous Incoming Letter 3 View
2003-07-23 DRW Drawings-only black and white line drawings 3 View
2003-04-23 CTNF Non-Final Rejection 7 View
2003-04-23 892 List of references cited by examiner 1 View
2003-04-21 SRNT Examiner's search strategy and results 1 View
2003-02-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-02-19 SPEC Specification 3 View
2003-02-19 CLM Claims 1 View
2003-02-19 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2002-11-18 CTNF Non-Final Rejection 9 View
2002-11-18 892 List of references cited by examiner 1 View
2002-11-06 SRNT Examiner's search strategy and results 1 View
2002-03-11 C.AD Change of Address 1 View
2001-07-20 PEFR Applicant Response to Pre-Exam Formalities Notice 3 View
2001-07-20 OATH Oath or Declaration filed 9 View
2001-07-20 DRW Drawings-only black and white line drawings 3 View
2001-07-20 TRNA Transmittal of New Application 3 View
2001-07-20 DRW Drawings-only black and white line drawings 3 View
2001-05-15 PEFN Pre-Exam Formalities Notice 2 View
2001-03-15 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-03-15 SRFW Search information including classification, databases and other search related notes 1 View
2001-03-15 FWCLM Index of Claims 1 View
2001-03-15 TRNA Transmittal of New Application 5 View
2001-03-15 DRW Drawings-only black and white line drawings 2 View
2001-03-15 SPEC Specification 24 View
2001-03-15 CLM Claims 5 View
2001-03-15 ABST Abstract 1 View
2001-03-15 OATH Oath or Declaration filed 3 View
2001-03-15 WFEE Fee Worksheet (SB06) 1 View
2001-03-15 WFEE Fee Worksheet (SB06) 1 View
2001-03-15 WCLM Claims Worksheet (PTO-2022) 1 View
2001-03-15 TRNA Transmittal of New Application 5 View
2001-03-15 SPEC Specification 24 View
2001-03-15 CLM Claims 5 View
2001-03-15 ABST Abstract 1 View
2001-03-15 DRW Drawings-only black and white line drawings 2 View
2001-03-15 OATH Oath or Declaration filed 3 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,822,248
App. No.
09/809,766
Filed
2001-03-15
Granted
2004-11-23
Pub. No.
US20020130274A1
Art Unit
2881
PTA
-1 days