Granted Patent
Utility
US 6,589,860
· Confirmation No. 6677
SYSTEM AND METHOD FOR CALIBRATING ELECTRON BEAM DEFECT INSPECTION TOOL
Patented Case
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-03-16 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-03-16 | SPEC |
Specification | 7 | View | |
| 2001-03-16 | CLM |
Claims | 3 | View | |
| 2001-03-16 | ABST |
Abstract | 1 | View | |
| 2001-03-16 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-03-16 | OATH |
Oath or Declaration filed | 2 | View | |
| 2001-03-16 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-03-16 | SPEC |
Specification | 7 | View | |
| 2001-03-16 | CLM |
Claims | 3 | View | |
| 2001-03-16 | ABST |
Abstract | 1 | View | |
| 2001-03-16 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-03-16 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
438/613
H10P74/277
H10W20/067
G01R31/307
G01R35/005
Prosecution
- Examiner
- LEE, GRANVILL D
- Art Unit
- 2825
- Docket No.
- P1285
- Confirmation No.
- 6677
Patent Term Adjustment
0days
No related applications found.
RELEASE OF SECURITY INTEREST
Recorded 2021-05-12
RELEASE OF SECURITY INTEREST
Recorded 2020-11-20
from
GLOBALFOUNDRIES INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-11-02
from
GLOBALFOUNDRIES INC.
SECURITY AGREEMENT
Recorded 2018-11-29
AFFIRMATION OF PATENT ASSIGNMENT
Recorded 2009-08-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-03-16
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Quick Facts
- Patent No.
- US 6,589,860
- App. No.
- 09/811,190
- Filed
- 2001-03-16
- Granted
- 2003-07-08
- Examiner
- LEE, GRANVILL D
- Art Unit
- 2825
- PTA
- 0 days
External Links