IP Library › Granted Patent US 6,664,026
Granted Patent Utility
US 6,664,026 · Confirmation No. 6478

METHOD OF MANUFACTURING HIGH ASPECT RATIO PHOTOLITHOGRAPHIC FEATURES

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2003-10-08 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-08-02 TRNA Transmittal of New Application 2 View
2001-08-02 DRW Drawings-only black and white line drawings 4 View
2001-08-02 LET. Miscellaneous Incoming Letter 1 View
2001-03-22 TRNA Transmittal of New Application 1 View
2001-03-22 SPEC Specification 9 View
2001-03-22 CLM Claims 2 View
2001-03-22 ABST Abstract 1 View
2001-03-22 DRW Drawings-only black and white line drawings 3 View
2001-03-22 OATH Oath or Declaration filed 3 View
2001-03-22 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,664,026
App. No.
09/815,540
Filed
2001-03-22
Granted
2003-12-16
Pub. No.
US20020136990A1
Examiner
SAGAR, KRIPA
Art Unit
1756
PTA
0 days