Granted Patent
Utility
US 6,436,281
· Confirmation No. 2649
APPARATUS FOR TREATING WASTEWATER FROM A CHEMICAL-MECHANICAL POLISHING PROCESS USED IN CHIP FABRICATION
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2015-08-07 | OATH |
Oath or Declaration filed | 11 | View | |
| 2001-04-10 | TRNA |
Transmittal of New Application | 5 | View | |
| 2001-04-10 | SPEC |
Specification | 16 | View | |
| 2001-04-10 | CLM |
Claims | 2 | View | |
| 2001-04-10 | ABST |
Abstract | 1 | View | |
| 2001-04-10 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2001-04-10 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
J¿rgen Hammer
Radeberg, GERMANY
Andre Richter
Neustadt/Sachsen, GERMANY
Werner Kraus
Teublitz, GERMANY
Hans-Dieter Petermann
Stuttgart, GERMANY
Attorneys & Agents of Record
Classification
USPC
210/96.2
B01D61/145
B01D61/025
B01D61/027
B01D61/22
B01D61/58
C02F1/441
C02F1/442
C02F1/444
Prosecution
- Examiner
- DRODGE, JOSEPH W
- Art Unit
- 1723
- Docket No.
- GR 97 P 8045 D
- Confirmation No.
- 2649
Foreign Priority
197 17 865.0
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1997-04-28
·
GERMANY
Publication
- Pub. No.
- US20010017277A1
- Pub. Date
- 2001-08-30
Patent Term Adjustment
-32days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-08-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-02-18
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Quick Facts
- Patent No.
- US 6,436,281
- App. No.
- 09/829,871
- Filed
- 2001-04-10
- Granted
- 2002-08-20
- Pub. No.
- US20010017277A1
- Examiner
- DRODGE, JOSEPH W
- Art Unit
- 1723
- PTA
- -32 days
External Links