IP Library Granted Patent US 6,509,201
Granted Patent Utility
US 6,509,201 · Confirmation No. 1652

METHOD AND APPARATUS FOR MONITORING WAFER STRESS

Inventor: Marilyn I. Wright
Patented Case View Patent ↗
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Code Description Pages PDF
2011-03-04 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2001-04-11 TRNA Transmittal of New Application 3 View
2001-04-11 SPEC Specification 21 View
2001-04-11 CLM Claims 10 View
2001-04-11 ABST Abstract 1 View
2001-04-11 DRW Drawings-only black and white line drawings 7 View
2001-04-11 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,509,201
App. No.
09/832,697
Filed
2001-04-11
Granted
2003-01-21
Art Unit
2822
PTA
0 days