Patent Application
Utility
App. No. 09/834,118
· Confirmation No. 3410
METHOD OF CALIBRATING A SEMICONDUCTOR WAFER DRYING APPARATUS
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-09-25 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-04-12 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-04-12 | ADS |
Application Data Sheet | 2 | View | |
| 2001-04-12 | SPEC |
Specification | 10 | View | |
| 2001-04-12 | CLM |
Claims | 5 | View | |
| 2001-04-12 | ABST |
Abstract | 1 | View | |
| 2001-04-12 | DRW |
Drawings-only black and white line drawings | 1 | View |
Inventors
Yoshio Iwamoto
Utsunomiya City Tochigi Perf, JAPAN
James C. Lenk
O'Fallon, MO
Philip Schmidt
Harvester, MO
Craig Spohr
Kirkwood, MO
Leslie G. Stanton
O'Fallon, MO
Attorneys & Agents of Record
Classification
USPC
219/494
H10P72/0604
H10P72/0408
Prosecution
- Examiner
- PAIK, SANG YEOP
- Art Unit
- 3761
- Customer No.
- 321
- Docket No.
- 002900/2919
- Confirmation No.
- 3410
Publication
- Pub. No.
- US20020148826A1
- Pub. Date
- 2002-10-17
Patent Term Adjustment
0days
No related applications found.
MEMC ELECTRONIC MATERIALS, INC. (NOW KNOWN AS SUNEDISON, INC.),
MEMC PASADENA, INC.,
PLASMASIL, L.L.C.,
SIBOND, L.L.C.,
MEMC SOUTHWEST INC.,
MEMC INTERNATIONAL, INC. (NOW KNOWN AS SUNEDISON INTERNATIONAL, INC.)
from
CITICORP USA, INC.
RELEASE OF SECURITY INTEREST TO REEL/FRAME: 012280/0161
Recorded 2014-03-17
from
CITICORP USA, INC.
RELEASE OF SECURITY INTEREST
Recorded 2005-08-11
from
MEMC ELECTRONIC MATERIALS, INC.,
MEMC HOLDINGS CORPORATION,
MEMC INTERNATIONAL, INC.,
MEMC PASADENA, INC.,
MEMC SOUTHWEST INC.,
PLASMASIL, L.L.C.,
SIBOND, L.L.C.
SECURITY AGREEMENT
Recorded 2001-12-28
from
MEMC ELECTRONIC MATERIALS, INC.,
MEMC INTERNATIONAL, INC.,
MEMC PASADENA, INC.,
MEMC SOUTHWEST INC.,
PLASMASIL, L.L.C.,
SIBOND, L.L.C.
SECURITY INTEREST
Recorded 2001-11-21
from
MEMC ELECTRONIC MATERIALS, INC.,
MEMC INTERNATIONAL, INC.,
MEMC PASADENA, INC.,
MEMC SOUTHWEST INC.,
PLASMASIL, L.L.C.,
SIBOND, L.L.C.
SECURITY AGREEMENT
Recorded 2001-11-21
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-07-12
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Quick Facts
- App. No.
- 09/834,118
- Filed
- 2001-04-12
- Granted
- 2003-11-18
- Pub. No.
- US20020148826A1
- Examiner
- PAIK, SANG YEOP
- Art Unit
- 3761
- PTA
- 0 days
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