IP Library › Granted Patent US 6,632,746
Granted Patent Utility
US 6,632,746 · Confirmation No. 7541

ETCHING METHOD, SEMICONDUCTOR AND FABRICATING METHOD FOR THE SAME

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2020-02-20 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2020-02-20 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2020-02-14 PA.. Power of Attorney 1 View
2020-02-14 R3.73 Assignee showing of ownership per 37 CFR 3.73 6 View
2020-02-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-02-27 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-02-27 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-02-13 PA.. Power of Attorney 1 View
2014-02-13 MFEE.C.AD Maintenance Fee Address Change 1 View
2014-02-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-02-13 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2003-08-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-08-15 TRNA Transmittal of New Application 3 View
2001-08-15 A.PE Preliminary Amendment 8 View
2001-08-15 SPEC Specification 98 View
2001-08-15 CLM Claims 9 View
2001-08-15 ABST Abstract 1 View
2001-08-15 DRW Drawings-only black and white line drawings 26 View
2001-08-15 OATH Oath or Declaration filed 3 View
2001-04-19 TRNA Transmittal of New Application 1 View
2001-04-19 ADS Application Data Sheet 2 View
2001-04-19 SPEC Specification 61 View
2001-04-19 DRW Drawings-only black and white line drawings 26 View
2001-04-19 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,632,746
App. No.
09/837,556
Filed
2001-04-19
Granted
2003-10-14
Pub. No.
US20020061654A1
Art Unit
1765
PTA
-150 days