Granted Patent
Utility
US 6,623,895
· Confirmation No. 4370
HYBRID PHASE-SHIFT MASK
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-07-22 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-04-24 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-04-24 | SPEC |
Specification | 22 | View | |
| 2001-04-24 | CLM |
Claims | 4 | View | |
| 2001-04-24 | ABST |
Abstract | 1 | View | |
| 2001-04-24 | DRW |
Drawings-only black and white line drawings | 13 | View |
Inventors
Jang Fung Chen
Cupertino, CA
Roger Caldwell
Milpitas, CA
Thomas Laidig
Point Richmond, CA
Kurt E. Wampler
Sunnyvale, CA
Attorneys & Agents of Record
Classification
USPC
430/50
G03F1/32
G03F1/26
G03F1/28
G03F1/30
G03F1/34
G03F7/707
Prosecution
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- Docket No.
- 55071-049
- Confirmation No.
- 4370
Publication
- Pub. No.
- US20020015899A1
- Pub. Date
- 2002-02-07
Patent Term Adjustment
-100days
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-14
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Quick Facts
- Patent No.
- US 6,623,895
- App. No.
- 09/840,291
- Filed
- 2001-04-24
- Granted
- 2003-09-23
- Pub. No.
- US20020015899A1
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- PTA
- -100 days
External Links