Granted Patent
Utility
US 6,835,510
· Confirmation No. 9422
HYBRID PHASE-SHIFT MASK
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-11-12 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-08-11 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-08-11 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-08-11 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-08-11 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-08-11 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-07-29 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-07-29 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-07-19 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2004-07-19 | CLM |
Claims | 6 | View | |
| 2004-07-19 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2004-07-19 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2004-07-19 | XT/ |
Extension of Time | 1 | View | |
| 2004-03-18 | CTNF |
Non-Final Rejection | 8 | View | |
| 2004-03-18 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2004-03-18 | SPEC |
Specification | 2 | View | |
| 2004-03-18 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-09-16 | TRNA |
Transmittal of New Application | 3 | View | |
| 2003-09-16 | A.PE |
Preliminary Amendment | 1 | View | |
| 2003-09-16 | SPEC |
Specification | 1 | View | |
| 2003-09-16 | CLM |
Claims | 2 | View | |
| 2003-09-16 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2003-09-16 | SPEC |
Specification | 22 | View | |
| 2003-09-16 | CLM |
Claims | 4 | View | |
| 2003-09-16 | ABST |
Abstract | 1 | View | |
| 2003-09-16 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2003-09-16 | OATH |
Oath or Declaration filed | 3 | View | |
| 2003-09-16 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2003-09-16 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-09-16 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Jang Fung Chen
Cupertino, CA
Roger Caldwell
Milpitas, CA
Thomas Laidig
Point Richmond, CA
Kurt E. Wampler
Sunnyvale, CA
Attorneys & Agents of Record
Classification
USPC
430/5
G03F1/32
G03F1/26
G03F1/28
G03F1/30
G03F1/34
G03F7/707
Prosecution
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- Customer No.
- 20277
- Docket No.
- 55071-280
- Confirmation No.
- 9422
Publication
- Pub. No.
- US20040067423A1
- Pub. Date
- 2004-04-08
Patent Term Adjustment
-32days
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- Patent No.
- US 6,835,510
- App. No.
- 10/662,365
- Filed
- 2003-09-16
- Granted
- 2004-12-28
- Pub. No.
- US20040067423A1
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- PTA
- -32 days
External Links