Granted Patent
Utility
US 6,383,824
· Confirmation No. 1061
METHOD OF USING SCATTEROMETRY MEASUREMENTS TO CONTROL DEPOSITION PROCESSES
Inventor:
Kevin R. Lensing
Patented Case
View Patent ↗
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-03-04 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2001-04-25 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-04-25 | SPEC |
Specification | 19 | View | |
| 2001-04-25 | CLM |
Claims | 11 | View | |
| 2001-04-25 | ABST |
Abstract | 1 | View | |
| 2001-04-25 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-04-25 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Kevin R. Lensing
Austin, TX
Attorneys & Agents of Record
Classification
USPC
438/14
H10P74/238
H10P74/277
G01B11/30
Prosecution
- Examiner
- LUK, OLIVIA T
- Art Unit
- 2812
- Customer No.
- 10742
- Docket No.
- 2162.072700/TT4380
- Confirmation No.
- 1061
Patent Term Adjustment
0days
No related applications found.
RELEASE OF SECURITY INTEREST
Recorded 2021-05-12
RELEASE OF SECURITY INTEREST
Recorded 2020-11-20
from
GLOBALFOUNDRIES INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-11-02
from
GLOBALFOUNDRIES INC.
SECURITY AGREEMENT
Recorded 2018-11-29
AFFIRMATION OF PATENT ASSIGNMENT
Recorded 2009-08-18
from
LENSING, KEVIN R.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-04-25
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Quick Facts
- Patent No.
- US 6,383,824
- App. No.
- 09/843,111
- Filed
- 2001-04-25
- Granted
- 2002-05-07
- Examiner
- LUK, OLIVIA T
- Art Unit
- 2812
- PTA
- 0 days
External Links