Granted Patent
Utility
US 6,492,074
· Confirmation No. 6528
MASK FOR ELECTRON BEAM DRAWING UTILIZING AUXILIARY PATTERNS THAT DO NOT BORE THROUGH THE SUBSTRATE
Inventor:
Yasuhisa Yamada
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-05-03 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-05-03 | SPEC |
Specification | 11 | View | |
| 2001-05-03 | CLM |
Claims | 1 | View | |
| 2001-05-03 | ABST |
Abstract | 1 | View | |
| 2001-05-03 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-05-03 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Yasuhisa Yamada
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
430/5
Prosecution
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- Customer No.
- 26304
- Docket No.
- NEC 18.631
- Confirmation No.
- 6528
Foreign Priority
144349/2000
·
2000-05-17
·
JAPAN
Publication
- Pub. No.
- US20010044055A1
- Pub. Date
- 2001-11-22
Patent Term Adjustment
0days
No related applications found.
CHANGE OF ADDRESS
Recorded 2017-11-29
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-19
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Quick Facts
- Patent No.
- US 6,492,074
- App. No.
- 09/848,124
- Filed
- 2001-05-03
- Granted
- 2002-12-10
- Pub. No.
- US20010044055A1
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- PTA
- 0 days
External Links