Granted Patent
Utility
US 6,485,573
· Confirmation No. 1377
APPARATUS FOR REDUCED-PRESSURE EPITAXIAL GROWTH AND METHOD OF CONTROLLING THE APPARATUS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-05-16 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-05-16 | A.PE |
Preliminary Amendment | 4 | View | |
| 2001-05-16 | SPEC |
Specification | 19 | View | |
| 2001-05-16 | CLM |
Claims | 3 | View | |
| 2001-05-16 | ABST |
Abstract | 1 | View | |
| 2001-05-16 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-05-16 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Katsuyuki Iwata
Hamamatsu-city, JAPAN
Tadashi Ohashi
Kudamatsu-city, JAPAN
Shuji Tobashi
Hiratsuka-city, JAPAN
Shinichi Mitani
Numazu-city, JAPAN
Hideki Arai
Numazu-city, JAPAN
Hideki Ito
Numazu-city, JAPAN
Attorneys & Agents of Record
Classification
USPC
118/730
C23C16/4412
C23C16/45521
C23C16/45557
C23C16/4583
C23C16/4584
C23C16/52
C30B25/12
C30B25/14
Prosecution
- Examiner
- ANDERSON, MATTHEW A
- Art Unit
- 1765
- Docket No.
- 047297/0122
- Confirmation No.
- 1377
Foreign Priority
2000-182598
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2000-06-19
·
JAPAN
Publication
- Pub. No.
- US20010052316A1
- Pub. Date
- 2001-12-20
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-05-10
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-08-15
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-05-16
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Quick Facts
- Patent No.
- US 6,485,573
- App. No.
- 09/855,654
- Filed
- 2001-05-16
- Granted
- 2002-11-26
- Pub. No.
- US20010052316A1
- Examiner
- ANDERSON, MATTHEW A
- Art Unit
- 1765
- PTA
- 0 days
External Links