IP Library Granted Patent US 6,464,563
Granted Patent Utility
US 6,464,563 · Confirmation No. 4894

METHOD AND APPARATUS FOR DETECTING DISHING IN A POLISHED LAYER

Inventor: Kevin R. Lensing
Patented Case View Patent ↗
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Code Description Pages PDF
2011-03-04 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2001-05-18 TRNA Transmittal of New Application 3 View
2001-05-18 SPEC Specification 16 View
2001-05-18 CLM Claims 9 View
2001-05-18 ABST Abstract 1 View
2001-05-18 DRW Drawings-only black and white line drawings 6 View
2001-05-18 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,464,563
App. No.
09/860,226
Filed
2001-05-18
Granted
2002-10-15
Art Unit
3723
PTA
-12 days