IP Library › Granted Patent US 6,592,939
Granted Patent Utility
US 6,592,939 · Confirmation No. 7186

SYSTEM FOR AND METHOD OF USING DEVELOPER AS A SOLVENT TO SPREAD PHOTORESIST FASTER AND REDUCE PHOTORESIST CONSUMPTION

Inventor: James Jiahua Yu
Patented Case View Patent ↗
⬇ PDF
 Code Description Pages PDF
2011-01-26 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-01-26 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-01-14 PA.. Power of Attorney 1 View
2011-01-14 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2011-01-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-06-06 TRNA Transmittal of New Application 3 View
2001-06-06 SPEC Specification 9 View
2001-06-06 CLM Claims 3 View
2001-06-06 ABST Abstract 1 View
2001-06-06 DRW Drawings-only black and white line drawings 1 View
2001-06-06 OATH Oath or Declaration filed 4 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,592,939
App. No.
09/875,596
Filed
2001-06-06
Granted
2003-07-15
Art Unit
1762
PTA
0 days