IP Library › Granted Patent US 6,648,982
Granted Patent Utility
US 6,648,982 · Confirmation No. 4651

STEAM CLEANING SYSTEM AND METHOD FOR SEMICONDUCTOR PROCESS EQUIPMENT

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2014-09-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-09-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-09-16 PA.. Power of Attorney 1 View
2014-09-16 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2014-09-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2005-06-24 COCOUT Certificate of Correction - Post Issue Communication 1 View
2003-09-16 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-09-16 LET. Miscellaneous Incoming Letter 1 View
2003-07-30 C.AD Change of Address 1 View
2001-06-11 TRNA Transmittal of New Application 3 View
2001-06-11 ADS Application Data Sheet 2 View
2001-06-11 SPEC Specification 7 View
2001-06-11 CLM Claims 6 View
2001-06-11 ABST Abstract 1 View
2001-06-11 DRW Drawings-only black and white line drawings 1 View
2001-06-11 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,648,982
App. No.
09/879,412
Filed
2001-06-11
Granted
2003-11-18
Art Unit
1746
PTA
-10 days