IP Library Granted Patent US 6,436,778
Granted Patent Utility
US 6,436,778 · Confirmation No. 5139

NOVEL RE-OXIDATION APPROACH TO IMPROVE PERIPHERAL GATE OXIDE INTEGRITY IN A TUNNEL NITRIDE OXIDATION PROCESS

Inventors: Hao Fang, Yue-Song He
Patented Case View Patent ↗
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Code Description Pages PDF
2001-06-12 TRNA Transmittal of New Application 5 View
2001-06-12 SPEC Specification 11 View
2001-06-12 CLM Claims 4 View
2001-06-12 ABST Abstract 1 View
2001-06-12 DRW Drawings-only black and white line drawings 3 View
2001-06-12 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,436,778
App. No.
09/879,738
Filed
2001-06-12
Granted
2002-08-20
Art Unit
2824
PTA
-11 days