IP Library Granted Patent US 6,483,193
Granted Patent Utility
US 6,483,193 · Confirmation No. 5889

FABRICATION PROCESS FOR A SEMICONDUCTOR DEVICE WITH DAMASCENE INTERCONNECT LINES OF THE SAME LEVEL SEPARATED BY INSULATORS WITH DIFFERENT DIELECTRIC CONSTANTS

Inventor: Tatsuya Usami
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Code Description Pages PDF
2020-06-11 OATH Oath or Declaration filed 262 View
2001-06-28 TRNA Transmittal of New Application 2 View
2001-06-28 A.PE Preliminary Amendment 4 View
2001-06-28 SPEC Specification 32 View
2001-06-28 CLM Claims 7 View
2001-06-28 ABST Abstract 1 View
2001-06-28 DRW Drawings-only black and white line drawings 9 View
2001-06-28 OATH Oath or Declaration filed 1 View
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Quick Facts
Patent No.
US 6,483,193
App. No.
09/893,926
Filed
2001-06-28
Granted
2002-11-19
Pub. No.
US20010048165A1
Examiner
HO, TU TU V
Art Unit
2818
PTA
-4 days