Granted Patent
Utility
US 6,635,409
· Confirmation No. 3640
METHOD OF STRENGTHENING PHOTORESIST TO PREVENT PATTERN COLLAPSE
Patented Case
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-08-26 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-07-12 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-07-12 | A.PE |
Preliminary Amendment | 4 | View | |
| 2001-07-12 | SPEC |
Specification | 17 | View | |
| 2001-07-12 | CLM |
Claims | 5 | View | |
| 2001-07-12 | ABST |
Abstract | 1 | View | |
| 2001-07-12 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2001-07-12 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Christopher F. Lyons
Fremont, CA
Scott A. Bell
San Jose, CA
Todd Lukanc
San Jose, CA
Marina V. Platt
San Jose, CA
Attorneys & Agents of Record
Classification
USPC
430/313
Prosecution
- Examiner
- BARRECA, NICOLE M
- Art Unit
- 1756
- Docket No.
- 039153-0374
- Confirmation No.
- 3640
Patent Term Adjustment
0days
No related applications found.
CORRECTIVE ASSIGNMENT TO CORRECT THE CONVEYING PARTY'S NAME PREVIOUSLY RECORDED AT REEL: 058796 FRAME: 0572. ASSIGNOR(S) HEREBY CONFIRMS THE CHANGE OF NAME.
Recorded 2023-08-16
CHANGE OF NAME
Recorded 2021-11-03
RELEASE OF SECURITY INTEREST
Recorded 2020-11-10
AMENDED AND RESTATED U.S. PATENT SECURITY AGREEMENT (FOR NON-U.S. GRANTORS)
Recorded 2018-08-22
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-02-22
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-07-12
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Quick Facts
- Patent No.
- US 6,635,409
- App. No.
- 09/902,568
- Filed
- 2001-07-12
- Granted
- 2003-10-21
- Examiner
- BARRECA, NICOLE M
- Art Unit
- 1756
- PTA
- 0 days
External Links