IP Library › Granted Patent US 6,585,908
Granted Patent Utility
US 6,585,908 · Confirmation No. 2250

SHALLOW ANGLE INTERFERENCE PROCESS AND APPARATUS FOR DETERMINING REAL-TIME ETCHING RATE

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2013-03-21 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-03-21 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-02-07 PA.. Power of Attorney 1 View
2013-02-07 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2013-02-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-07-13 TRNA Transmittal of New Application 5 View
2001-07-13 SPEC Specification 24 View
2001-07-13 CLM Claims 8 View
2001-07-13 ABST Abstract 1 View
2001-07-13 DRW Drawings-only black and white line drawings 5 View
2001-07-13 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,585,908
App. No.
09/905,032
Filed
2001-07-13
Granted
2003-07-01
Pub. No.
US20030062337A1
Art Unit
1765
PTA
-140 days