IP Library › Assignment 012149/0858
Patent Assignment
Reel/Frame 012149/0858

Assignment of Assignor's Interest

Recorded: 2001-09-11 Pages: 3
Assignors
CARDOSO, ANDRE G.
Executed: 2001-08-01
JANOS, ALAN C.
Executed: 2001-08-01
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property (1)
Shallow Angle Interference Process and Apparatus for Determining Real-Time Etching Rate
Patent: 6,585,908 →
Application: 09/905,032 →
Publication: US 2003/0062337
Related Assignments (3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Assignment of Assignor's Interest Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →