IP Library Patent Application 09918428
Patent Application Utility
App. No. 09/918,428 · Confirmation No. 3859

METHOD FOR FORMING AN INSULATOR HAVING A LOW DIELECTRIC CONSTANT ON A SEMICONDUCTOR SUBSTRATE

Inventor: Markus Kirchhoff
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2003-12-23 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-12-22 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-07-27 TRNA Transmittal of New Application 1 View
2001-07-27 SPEC Specification 8 View
2001-07-27 CLM Claims 2 View
2001-07-27 ABST Abstract 1 View
2001-07-27 DRW Drawings-only black and white line drawings 1 View
2001-07-27 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
09/918,428
Filed
2001-07-27
Granted
2004-03-30
Pub. No.
US20020022339A1
Art Unit
2824
PTA
-13 days