Granted Patent
Utility
US 6,472,327
· Confirmation No. 5307
METHOD AND SYSTEM FOR ETCHING TUNNEL OXIDE TO REDUCE UNDERCUTTING DURING MEMORY ARRAY FABRICATION
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-08-08 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-08-08 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-08-08 | SPEC |
Specification | 7 | View | |
| 2001-08-08 | CLM |
Claims | 3 | View | |
| 2001-08-08 | ABST |
Abstract | 1 | View | |
| 2001-08-08 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-08-08 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
438/704
H10B41/40
H10D64/035
H10B41/43
Prosecution
- Examiner
- GARCIA, JOANNIE A
- Art Unit
- 2823
- Docket No.
- 1343D/DA01022
- Confirmation No.
- 5307
Publication
- Pub. No.
- US20020028583A1
- Pub. Date
- 2002-03-07
Patent Term Adjustment
-20days
CORRECTIVE ASSIGNMENT TO CORRECT THE 8647899 PREVIOUSLY RECORDED ON REEL 035240 FRAME 0429. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTERST.
Recorded 2020-11-03
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-12-14
PARTIAL RELEASE OF SECURITY INTEREST IN PATENTS
Recorded 2016-08-11
from
SPANSION, LLC
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-06-29
SECURITY INTEREST
Recorded 2015-03-21
from
BARCLAYS BANK PLC
RELEASE OF SECURITY INTEREST
Recorded 2015-03-13
SECURITY AGREEMENT
Recorded 2010-06-04
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-03-19
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Quick Facts
- Patent No.
- US 6,472,327
- App. No.
- 09/925,205
- Filed
- 2001-08-08
- Granted
- 2002-10-29
- Pub. No.
- US20020028583A1
- Examiner
- GARCIA, JOANNIE A
- Art Unit
- 2823
- PTA
- -20 days
External Links