Granted Patent
Utility
US 6,635,395
· Confirmation No. 4291
METHOD FOR EXPOSING A LAYOUT COMPRISING MULTIPLE LAYERS ON A WAFER
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-08-26 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-08-13 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-08-13 | SPEC |
Specification | 28 | View | |
| 2001-08-13 | CLM |
Claims | 3 | View | |
| 2001-08-13 | ABST |
Abstract | 1 | View | |
| 2001-08-13 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-08-13 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Peter Hahmann
Jena-Drackendorf, GERMANY
Eckart Bergmann
Jena, GERMANY
Attorneys & Agents of Record
Classification
USPC
430/22
Prosecution
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- Customer No.
- 22428
- Docket No.
- 016790-0405
- Confirmation No.
- 4291
Publication
- Pub. No.
- US20020039828A1
- Pub. Date
- 2002-04-04
Patent Term Adjustment
-1days
CHANGE OF NAME
Recorded 2008-09-05
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-13
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Quick Facts
- Patent No.
- US 6,635,395
- App. No.
- 09/927,238
- Filed
- 2001-08-13
- Granted
- 2003-10-21
- Pub. No.
- US20020039828A1
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- PTA
- -1 days
External Links