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App. No. 09/931,595 · Confirmation No. 3008

CHEMISTRY FOR BORON DIFFUSION BARRIER LAYER AND METHOD OF APPLICATION IN SEMICONDUCTOR DEVICE FABRICATION

Inventor: Imad Mahawili
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2016-05-31 C.AD Change of Address 2 View
2016-05-31 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-10-15 TRNA Transmittal of New Application 2 View
2001-10-15 DRW Drawings-only black and white line drawings 6 View
2001-08-16 TRNA Transmittal of New Application 3 View
2001-08-16 ADS Application Data Sheet 1 View
2001-08-16 SPEC Specification 14 View
2001-08-16 CLM Claims 8 View
2001-08-16 ABST Abstract 1 View
2001-08-16 DRW Drawings-only black and white line drawings 12 View
2001-08-16 OATH Oath or Declaration filed 1 View
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Quick Facts
App. No.
09/931,595
Filed
2001-08-16
Granted
2004-10-05
Pub. No.
US20020023900A1
Art Unit
3761
PTA
-31 days