IP Library › Granted Patent US 6,487,744
Granted Patent Utility
US 6,487,744 · Confirmation No. 5729

DEVICE FOR CLEANING A WAFER OF ABRASIVE AGENT SUSPENSION REMAINING AFTER POLISHING WITH BRUSHES AND DI WATER

Inventor: Rudiger Hunger
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-09-04 TRNA Transmittal of New Application 1 View
2001-09-04 SPEC Specification 15 View
2001-09-04 CLM Claims 5 View
2001-09-04 ABST Abstract 1 View
2001-09-04 DRW Drawings-only black and white line drawings 3 View
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Quick Facts
Patent No.
US 6,487,744
App. No.
09/946,850
Filed
2001-09-04
Granted
2002-12-03
Pub. No.
US20020038486A1
Art Unit
1744
PTA
-19 days